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Atomic layer deposition
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11	SUPPLEMENTARY INFORMATION doi:nature14417 SUPPLEMENTARY METHODS MOCVD growth of ML MoS2 and WS2 films. As illustrated in Fig. 2a, the synthesis of ML Add to Reading List Source URL: park.chem.cornell.edu Language: English - Date: 2015-05-17 22:51:54 Chemistry Matter Thin film deposition Semiconductor device fabrication Metalorganic vapour phase epitaxy Atomic layer deposition Nucleation Indium nitride Grain boundary Molybdenum disulfide
12	Journal of Undergraduate Research 7, Tunability and Electrical Properties of Yttria-doped-ceria Films Fabricated via Atomic Layer Deposition Russell Sparks Department of Chemical Engineering, Carnegie Mello Add to Reading List Source URL: jur.phy.uic.edu Language: English - Date: 2014-07-25 14:41:23 Chemistry Electromagnetism Matter Thin film deposition Semiconductor device fabrication Atomic layer deposition Fuel cells Oxides Solid oxide fuel cell Yttrium Thin film Sheet resistance
13	Inside Front Cover: Defect Tolerance and Nanomechanics in Transistors that Use Semiconductor Nanomaterials and Ultrathin Dielectrics (Adv. Funct. Mater) Add to Reading List Source URL: rogers.matse.illinois.edu Language: English - Date: 2008-09-08 15:02:12 Chemistry Semiconductor device fabrication Inorganic compounds Electronic engineering Thin film deposition High- dielectric Transistors Crystalline silicon Wafer Silicon on insulator Atomic layer deposition Gallium arsenide
14	Innovation Meets Performance Demands of Advanced Lithium-ion Batteries Highlights in Research & Development Add to Reading List Source URL: www.nrel.gov Language: English - Date: 2016-06-02 18:59:17 Battery electricity) Lithium-ion batteries Battery Atomic layer deposition Electrochemistry Nanowire battery Nanoarchitectures for lithium-ion batteries
15	Journal of Undergraduate Research 4, Selective Atomic Layer Deposition (SALD) of Titanium Dioxide on Silicon and Copper Patterned Substrates K. Overhage Department of Chemical Engineering, Purdue University, I Add to Reading List Source URL: jur.phy.uic.edu Language: English - Date: 2011-03-09 12:29:52 Semiconductor device fabrication Chemistry Matter Manufacturing Thin film deposition Atomic layer deposition Titanium dioxide Chemical vapor deposition Diffusion barrier Thin film Titanium nitride Crystalline silicon
16	Journal of Undergraduate Research 3, Atomic Layer Deposited Al2 O3 Film on Si(100) as Buffer Layer for Hfx Ti1−x O2 Deposition Adam L. Kueltzo Thornton Fractional North High School, Calumet City, IL 60409 Add to Reading List Source URL: jur.phy.uic.edu Language: English - Date: 2009-11-24 11:31:03 Thin film deposition Semiconductor device fabrication Atomic layer deposition Matter Manufacturing Chemistry Thin film ALD Vacuum deposition
17	Journal of Undergraduate Research 3, Chemical Vapor Deposition of Nickel Ferrite Using Ni(C5 H5 )2 and Fe(C5 H4 C4 H9 )(C5 H5 ) M. A. Kimbell Department of Electrical Engineering, Rose-Hulman Institute of Techn Add to Reading List Source URL: jur.phy.uic.edu Language: English - Date: 2010-02-01 15:16:36 Thin film deposition Semiconductor device fabrication Chemical vapor deposition Metalorganic vapour phase epitaxy Thin film Vacuum deposition Epitaxy X-ray photoelectron spectroscopy Atomic layer deposition Chemical vapor deposition of ruthenium
18	MATEC Web of Conferences 39 , ) DOI: m atecconf1 0 C Owned by the authors, published by EDP Sciences, 2016 Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Add to Reading List Source URL: www.matec-conferences.org Language: English Semiconductor device fabrication Thin film deposition Materials science Atomic layer deposition Electrical resistivity and conductivity Plasma Coating Titanium nitride Polycrystalline silicon Chemical vapor deposition
19	Journal of Undergraduate Research 6, Atomic Layer Deposition of Cerium Oxide for Potential Use in Solid Oxide Fuel Cells R.R. Essex Department of Chemical Engineering, Rose-Hulman Institute of Technology, T Add to Reading List Source URL: jur.phy.uic.edu Language: English - Date: 2013-04-17 12:26:28 Fuel cells Thin film deposition Semiconductor device fabrication Oxides Atomic layer deposition Thin films Solid oxide fuel cell Cerium(IV) oxide Proton exchange membrane fuel cell Thin film Battery Cerium(III) oxide
20	FACULTY: FIELD OF STUDY: COURSE TITLE: LECTURER’S NAME: E-MAIL ADDRESS OF THE LECTURER: ECTS POINTS FOR THE COURSE: Add to Reading List Source URL: wtie.tu.koszalin.pl Language: English - Date: 2016-04-19 04:27:26 Thin film deposition Semiconductor device fabrication Vacuum Coatings Plasma processing Atomic layer deposition Vacuum deposition Thin film Chemical vapor deposition CVD Titanium nitride

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